Hi Keyur,

I think that HF etch will work and maybe a fluoride based
dry etch too.

Heiko

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-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Keyur Shah
Sent: Wednesday, July 10, 2002 7:20 AM
To: [email protected]
Subject: [mems-talk] PDMS etching


Hello everybody,

I want to etch PDMS for my research work. Can anybody
suggest me the ways to etch it? Is it possible to etch
PDMS by using oxygen plasma? if yes, what is the etch
rate?

Thanking you all in anticipation,

Keyur Shah

=====
Keyur Shah
M.S(Chemical Engineering), Louisiana Tech University
Research Assistant, Louisiana Tech University
Apt#12, 106, South Homer Street,
Ruston, Louisiana-71270,USA.
phone no:318-513-9240
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