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MEMSnet Home: MEMS-Talk: Al evaporation
Al evaporation
2002-07-11
Zhihai Zhang
2002-07-12
Rick Williston
2002-07-12
Neal Ricks
2002-07-12
Milan Buncick
2002-07-12
[email protected]
Al evaporation
Rick Williston
2002-07-12
zhihai

Talk to your crucible supplier.  There is a special brand of graphite that
is used for Al crucibles (the brand name eludes me for the moment, but there
may be different names depending on the vendors).  I assume you are using a
copper hearth.  If so, I have used Al directly in the copper without a
crucible and it worked just fine, it just takes more power so beware if your
power supply is already maxed out.

Rick

-----Original Message-----
From: [email protected] [mailto:[email protected]]On
Behalf Of Zhihai Zhang
Sent: Thursday, July 11, 2002 2:27 PM
To: [email protected]
Subject: [mems-talk] Al evaporation


Hello everyone,
I need do Al e-beam evaporation frequently.
However after several times, Al always spill out of the crucible and get the
crucible cracked. I use small ramp rate, it still happened.
How can I prevent it?
Thnaks,

Zhihai
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