We are considering the use of Ta for simple coplanar electrode strips (10
microns wide and 1000 microns long) patterned on quartz wafers, or maybe on
top of an LTO layer deposited on the quartz.  I imagine we have to
planarize to put this stuff down on the LTO, but are adhesion promoters
needed?  Are there any serious pitfalls to avoid in the use of this metal?
All suggestions or advice will be appreciated.

T.B. Jones


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Thomas B. Jones
Professor of Electrical Engineering
University of Rochester
P.O. Box 270126
Rochester, NY  14627-0126    (USA)
phone: 1-585-275-5233   fax: 1-585-273-4919
email: [email protected]
http://www.ece.rochester.edu/~jones
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