Hello Carsten,

          There is a MEMS fundry who may help you.
WALSIN LIHWA CORP.
TEL: 886-3-4786171 ext.320
FAX:886-2-22025165
Email: [email protected]
I hope this can help you!!


Wing Wu

Industrial Technology Research Institute
Opto-Electronics & Systems Laboratories
Chutung, Hsinchu 310, Taiwan, R.O.C.
Tel:886-3-5913718
Fax:886-3-5820258
E-mail:[email protected]
Http://www.oes.itri.org.tw