Dear MEMS experts,
I'm looking for information about the speed of Pyrex etching in HF.
Actually, we need to realize a cap wafer for MEMS packaging using pyrex
7740 and we'd like to know if raising temperature the process is faster.
Thanks a lot
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Dr. Paolo Bondavalli
R&D Engineer
LABCOM - MICROTEC
THALES (ex THOMSON-CSF) CORPORATE RESEARCH CENTER
Domaine de Corbeville,
Route Departementale 128
F91404 ORSAY
(FRANCE)
Tel : 01 69 33 08 63
Fax : 01 69 33 08 62
Email : [email protected]
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Disclaimer: Opinions expressed herein are my own and may
not represent those of my employer.
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