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MEMSnet Home: MEMS-Talk: Tall Tip Probes for MEMS Metrology
Tall Tip Probes for MEMS Metrology
2002-07-15
eugene chow
Tall Tip Probes for MEMS Metrology
eugene chow
2002-07-15
We are looking for people interested in trying a scanning probe technology for
non-destructive high-aspect ratio structure metrology. The probes have super
tall tips of 40-300 microns high, an order of magnitude higher than normal
scanning probes, and work in commercial atomic force microscopes (AFM) such as
the Dimension 3100 system. They are based on bent metal cantilevers on a
transparent substrate. They allow characterization of structures not readily
characterized by conventional AFMs, profilometers, or optical techniques. Other
applications such as electrical measurements and liquid measurements are also
possible. Please contact us for free probes.

Eugene Chow and Thomas Hantschel, Palo Alto Research Center (PARC), email:
[email protected]

http://www.parc.com/groups/eml/projects/probes/
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