I have not found an adhesion layer necessarry when depositing Ta on Silicon by
PVD evaporation, but this may be in part due to the high temperature at which it
goes down (sputtering may prove to be a different case).  I expect it would
stick to quartz equally well.  One downside to using Tantalum as an electrode
might be its self-passivating nature.  You may want to cap it with a thin layer
of Gold if you intend to probe the structure.
Neal Ricks


  "Thomas B. Jones"  wrote: We are considering the use
of Ta for simple coplanar electrode strips (10
microns wide and 1000 microns long) patterned on quartz wafers, or maybe on
top of an LTO layer deposited on the quartz. I imagine we have to
planarize to put this stuff down on the LTO, but are adhesion promoters
needed? Are there any serious pitfalls to avoid in the use of this metal?
All suggestions or advice will be appreciated.

T.B. Jones


________________________________________________________
Thomas B. Jones
Professor of Electrical Engineering
University of Rochester
P.O. Box 270126
Rochester, NY 14627-0126 (USA)
phone: 1-585-275-5233 fax: 1-585-273-4919
email: [email protected]
http://www.ece.rochester.edu/~jones
________________________________________________________
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