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MEMSnet Home: MEMS-Talk: High speed high precision?
High speed high precision?
2002-07-16
Tan Joo Lett
2002-07-16
David Nemeth
2002-07-16
Michael D Martin
High speed high precision?
Tan Joo Lett
2002-07-16
I'm looking for a small XY stage (50mm x 50mm) with a max speed of about
200mm/s and with repeatability of +/-1um.

Does anybody do stages like this?
Would really appreciate the information.

JooLett

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