Hi,

Have anyone ever heard about a Finnish company called Okmetic who provides all
kinds of wafer such like SOI, EPI wafers for IC, discrete and MEMS devices,
and MEMS wafers for bulk micromachining?? Here is it's website
http://www.okmetic.com. Okmetic claims its wafers have no bulk defect effects,
and result in perfect sidewalls after etching. I want to use it to improve
surface roughness after KOH etching. Can someone give me suggestions about
this MEMS wafer??


Wing Wu

Industrial Technology Research Institute
Opto-Electronics & Systems Laboratories
Taiwan, R.O.C.
Http://www.oes.itri.org.tw