> Have anyone ever heard about a Finnish company called Okmetic
> who provides all
> kinds of wafer such like SOI, EPI wafers for IC, discrete and
> MEMS devices,
> and MEMS wafers for bulk micromachining?? Here is it's website
> http://www.okmetic.com. Okmetic claims its wafers have no
> bulk defect effects,
> and result in perfect sidewalls after etching. I want to use
> it to improve
> surface roughness after KOH etching. Can someone give me
> suggestions about
> this MEMS wafer??

My experience is that Okmetic supplies excellent-quality SOI wafers,
including low surface roughness and low total-thickness variation (TTV).
I have not, however, looked at sidewall roughness after KOH etching.

        --Kirt Williams Agilent Technologies