Dear all,

we have 150 mm mechanical structured BSOI wafer. The edge is not structured
at a distance of 10mm. Does anybody has experience how to handle such wafer
only at the outer edge using a vacuum wall since the inner device area can
not be used. Or does anybody know a distributor of such shaped wakuum walls.
Conventional vakuum walls does not fit.

May somebody can help.

Torsten Kiessling


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Dipl.-Ing. Torsten Kie_ling
Fraunhofer Institute
Microelectronical Circuits and Systems
Grenzstr. 28
D-01109 Dresden

Tel.: +49(0)351/8823-283
Fax:                -266
email: [email protected]
Internet: http://www.imsdd.fhg.de/
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