Would someone be so kind as to give me a good reference(s) for the
"wagon-wheel" or "star-shaped" pattern that is sometimes used for
determining anisotropic etch rates in silicon?  A reference for alternate
test structures would also be appreciated.

Thanks,
Kevin Walsh


--
Dr. Kevin M. Walsh
Electrical Engineering Department, Speed Scientific School
University of Louisville, Louisville, KY 40292
(502) 852-0826

Internet address: [email protected]