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MEMSnet Home: MEMS-Talk: Silicon Dioxide Deposition
Silicon Dioxide Deposition
2002-07-19
Jon Peters
Silicon Dioxide Deposition
Jon Peters
2002-07-19
Hi,
    I want to deposit 3-5 um of Silicon dioxide on a silicon wafer.
  Can someone help with the suggested parameters using a PE-CVD 790?
  Has anyone tried using an ebeam for this purpose?
  Best way to etch Silicon Dioxide in this thickness?
  Best way to clean the system post deposit? I also use the PE-CVD for
silicon nitride.
  Thanks!

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