However, I've found that iodine based etches will aggressively undercut
Nickel if there is gold on top of it. It's pretty weird.
Some sort of physical process (RIE using Argon or ion mill) would probably
be the best, if you have access to it.
David Nemeth
Senior Process Engineer
Sophia Wireless, Inc.
14225-C Sullyfield Circle
Chantilly, VA
Ph: (703) 961-9573 x206
Fax:(703) 961-9576
-----Original Message-----
From: [email protected] [mailto:[email protected]]On
Behalf Of Roger Shile
Sent: Friday, July 19, 2002 2:20 PM
To: '[email protected]'
Subject: RE: [mems-talk] Gold etching
Transene TFA Gold Etch, which is an aquous solution of iodine and potassium
iodide, will etch the gold in a few seconds.
-----Original Message-----
From: Luciano Scaltrito [mailto:[email protected]]
Sent: Friday, July 19, 2002 1:24 AM
To: [email protected]
Subject: [mems-talk] Gold etching
Dear colleagues,
>I have a problem. I have to etch a thin film (200 angstrom) of Gold over a
>film of Nickel but I DON'T have to remove Nickel.
How can I do this?
Thank you
Luciano Scaltrito
----------------------------------------------------------------------------
------------
~ The truth is out there ~
Ing. Luciano Scaltrito
Dipartimento di Fisica
Politecnico di Torino
C.so Duca degli Abruzzi, 24
10129 Torino, Italy
tel +39 011 564.7305/564.4160
fax +39 011 564.7399
E-mail : [email protected]
http://www.polito.it/centri/laborato/limadel/film/index.html
----------------------------------------------------------------------------
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