You could consider ion milling if the Ni film is thick enough to withstand a
little bit of erosion.  Au will mill very fast in the typical Ar ion mill.

Dick

Richard T. Martin
Principal Engineer
Innovative Micro Technology
75 Robin Hill Road
Goleta, CA 93117
(805) 681-2824
[email protected] 
www.imtmems.com 



-----Original Message-----
From: Luciano Scaltrito [mailto:[email protected]]
Sent: Friday, July 19, 2002 1:24 AM
To: [email protected]
Subject: [mems-talk] Gold etching


Dear colleagues,

>I have a problem. I have to etch a thin film (200 angstrom) of Gold
>over a
>film of Nickel but I DON'T have to remove Nickel.

How can I do this?

Thank you
Luciano Scaltrito

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                ~ The truth is out there ~
Ing. Luciano Scaltrito
Dipartimento di Fisica
Politecnico di Torino
C.so Duca degli Abruzzi, 24
10129 Torino, Italy
tel +39 011 564.7305/564.4160
fax +39 011 564.7399
E-mail : [email protected]
http://www.polito.it/centri/laborato/limadel/film/index.html
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