Dear all,

I am looking for a RIE process of Chromium.
Do you know if it is possible to etch Cr only with SiCl4?
And what are typically the parameters  (etch rate, flow, rf Pwer W/cm2
pressure, bias ).

Thanks a lot

David




______________
David PEYRADE
LPN-CNRS
route de Nozay
91460 Marcoussis
FRANCE

Tel:    01 69 63 61 25
Fax:    01 69 63 60 06
Mobile: 06 82 17 57 91
________________