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MEMSnet Home: MEMS-Talk: photo resist dielectric layer
photo resist dielectric layer
2002-07-23
Martin O. Patton
2002-07-23
Justin Borski
photo resist dielectric layer
Martin O. Patton
2002-07-23
Dear MEMS-talkers,

Does anyone use photo resist for an interlayer dielectric, for example to
run conductors over a mesa edge?  If so, what kind?

Thanks,

Marty

Martin O. Patton
Senior Research Engineer
Essential Research Inc.
6410 Eastland Road Suite D
Cleveland, Ohio 44142
www.er.com
(440)816-9850

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