Hi, all.
I am trying to etch sacrificial SiO2 layer to release the interdigitated
comb-finger structures on SiO2. I am using RIE and/or Barrel Asher with CF4/O2
gas. Does anyone have process information for this purpose? I'd really
appreciate if one of you helps me.
Thanks in advance.
=================================
Sang Won Park
Graduate Research Assistant
Erik Jonsson School of Engineering and Computer Science
The University of Texas at Dallas
Richardson, TX 75083-0688
972-883-2893, [Fax] 972-883-6839
[E-mail] [email protected]
[Web] http://www.utdallas.edu/~spark
