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MEMSnet Home: MEMS-Talk: Aluminum etch problem
Aluminum etch problem
2002-07-24
Greg Miller
2002-07-24
[email protected]
2002-07-24
Bill Moffat
Aluminum etch problem
[email protected]
2002-07-24
You could try doing an aluminum lift-off technique to accomplish the same
results with little effect on the copper. Try Bill Moffett at Yield
Engineering Service (YES) as he is an expert on such techniques. Bob Henderson

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