A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: adhesion of Ag to Si
adhesion of Ag to Si
2002-07-24
Thomas B. Jones
2002-07-25
Jeff Zahn
2002-07-26
Zhen YANG
2002-07-24
[email protected]
2002-08-14
TEL Klaus Beschorner
adhesion of Ag to Si
[email protected]
2002-07-24
Tom:
A thin layer of Cr will definitely help with the adhesion of Ag on Silicon.
If you must deposit directly onto a Si surface you can do an Argon presputter
clean prior to deposition and that should help with the adhesion. If you are
using an evaporator without clean capability you might want to try to plasma
clean samples and run immediately after plasma clean. Bob Henderson

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
University Wafer
MEMStaff Inc.
The Branford Group
Process Variations in Microsystems Manufacturing