In the book "Biosensors: Microelectrochemical Devices"
by Lambrechts and Sansen, they do a nice explanation
of Ag adhesion using different metal seed layers.
They report corrosion of a silver electrode using a Cr
seed layer after 46 hours. Thyey also tried Ti as an
adhesion layer, but found the best solution was to use
a two metal seed layer of Ti/Pd that can be deposited
by e-beam evaporation.
Jeff
--- "Thomas B. Jones" wrote:
> Dear MEMS community:
>
> Is it true that Ag exhibits poor adhesion to Si, say
> for example, in
> comparison to Al? Will a thin layer of Cr help to
> improve this adhesion?
> Finally, are there other straightforward methods to
> promote adhesion of
> these materials?
>
> Thanks.
>
> Tom Jones
>
>
>
________________________________________________________
> Thomas B. Jones
> Professor of Electrical Engineering
> University of Rochester
> P.O. Box 270126
> Rochester, NY 14627-0126 (USA)
> phone: 1-585-275-5233 fax: 1-585-273-4919
> email: [email protected]
> http://www.ece.rochester.edu/~jones
>
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