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MEMSnet Home: MEMS-Talk: etching selectivity between Cr and Si3N4
etching selectivity between Cr and Si3N4
2002-07-25
li dong
etching selectivity between Cr and Si3N4
li dong
2002-07-25
I need a wet etching solution that can select Cr and Si3N4,
Any good tricks or solutions? thanks

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