A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: spectral output of nitrogen and oxygen plasmas?
spectral output of nitrogen and oxygen plasmas?
2002-07-25
Felix Lu
2002-07-26
[email protected]
spectral output of nitrogen and oxygen plasmas?
Felix Lu
2002-07-25
Hi,

  Does anyone have any information on the spectral output of nitrogen and
oxygen plasmas particularly in the UV region? say at, 30 mTorr and 100 and
400W?

Felix
--
Felix Lu
Materials Science and Engineering
University of California at San Diego
[email protected]

-- Please reply to [email protected], NOT [email protected] --

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Nano-Master, Inc.
MEMStaff Inc.
Mentor Graphics Corporation
MEMS Technology Review