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MEMSnet Home: MEMS-Talk: PECVD Si3N4 receipe
PECVD Si3N4 receipe
2002-07-26
Dlee Li
2002-07-29
Roger Shile
PECVD Si3N4 receipe
Dlee Li
2002-07-26
Hi friend,
anyone can tell me one workable PECVD Si3N4 receipe? my system is
Plasma-Therm.

Thanks
Dlee
Mechanical Engineering Department
The University of Texas at Austin



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