Hi, there,

Does sombody process diamond film (on Si substrate)?

I deposit Au layer(4000A) to form two electrodes on diamond film(>6um). These
two electrodes are sperated by etching. But Test always shows that there is a
resistance (~400K)between two electrodes. I am very confused about it. I am
quite sure Au doesn't touch with Si substrate and no crack in diamond film.

Do you have some good analysis?

Thanks very much!

Xiaoshan