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MEMSnet Home: MEMS-Talk: how to remove cool grease on the wafer
how to remove cool grease on the wafer
2002-07-28
Yuqi Jiang
2002-07-30
Blunier, Stefan
2002-07-30
Grobe, Dirk
how to remove cool grease on the wafer
Yuqi Jiang
2002-07-28
Hi,all,
I use cool grease during DRIE. After DRIE, some of
cool grease  was remained on the wafer surface, then,
the wafer  was soaked in acetone or IPA for more than
1 hour, but both were useless.
   how to remove cool grease?
  I will be very grateful if anyone give me some
information.
  Thanks!
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