BTW, the diamond film is not conductive. That's why I am so confused.

----- Original Message -----
From: "Martin, Dick" 
To: 
Sent: Monday, July 29, 2002 10:24 AM
Subject: RE: [mems-talk] problem in diamond film


> Are you sure your diamond film is not conducting.  Depending on your
process
> many diamond-like-films will show some conductivity.
>
> Good luck.
>
> Richard T. Martin
> Principal Engineer
> Innovative Micro Technology
> 75 Robin Hill Road
> Goleta, CA 93117
> (805) 681-2824
> [email protected] 
> www.imtmems.com 
>
>
>
> -----Original Message-----
> From: Xiaoshan Zhu [mailto:[email protected]]
> Sent: Friday, July 26, 2002 5:05 PM
> To: [email protected]
> Subject: [mems-talk] problem in diamond film
>
>
> Hi, there,
>
> Does sombody process diamond film (on Si substrate)?
>
> I deposit Au layer(4000A) to form two electrodes on diamond film(>6um).
> These two electrodes are sperated by etching. But Test always shows that
> there is a resistance (~400K)between two electrodes. I am very confused
> about it. I am quite sure Au doesn't touch with Si substrate and no crack
in
> diamond film.
>
> Do you have some good analysis?
>
> Thanks very much!
>
> Xiaoshan
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