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MEMSnet Home: MEMS-Talk: Masks for ACES simulations
Masks for ACES simulations
2002-07-29
Luiz Marangoni
2002-07-30
Richard Nelson
2002-07-31
Luiz Marangoni
2002-07-30
Roger Shile
2002-07-31
Danny Banks
2002-07-31
Luiz Marangoni
2002-08-01
Roger Shile
Masks for ACES simulations
Luiz Marangoni
2002-07-29
Hello folks,

I4m starting to use ACES (Anisotropic Etch Simulator) to simulate some
structures but I didn4t find a (good) way to generate the masks to use in
the simulations.
I4m using FreeHand (a vetorial editor) to generate the masks and to export
in BMP format, but I4m facing some ems with this procedure (distortion of
the dimensions).
Someone know some way to use AutoCad or LASI to generate the masks or have
used the CIF or GDS formats in ACES simulations?
Thanks in advance,

Luiz Marangoni
UNICAMP - Campinas - Brazil

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