Hi Yuqi Jiang!

Have you tried to clean your wafer in H2O2-2H2SO4 ?

If nothing helps, then try to prepare your wafer before you put the cool
grease on top.
A 2-layer-resist is helpful to lift-off the grease after DRIE. 1st layer PMGI
resist, 2nd layer AZ Resist (both pre-baked), then put the grease on the top.
After DRIE you lift-off the grease with Acetone. Finally remove all the
remaining dirt with 1-Methyl-2-Pyrollidon or EBR (removing PMGI).

Good luck.

Regards
Dirk

----------------------------------------
Gesellschaft f|r Diamantprodukte mbH, Ulm
Company for Diamond Products Ltd., Ulm, Germany
www.gfd-diamond.com

  fon: +49(731)505-4546
  fax: +49(731)505-4561



> -----Original Message-----
> From: Yuqi Jiang [mailto:[email protected]]
> Sent: Monday, July 29, 2002 4:53 AM
> To: [email protected]
> Subject: [mems-talk] how to remove cool grease on the wafer
>
>
> Hi,all,
> I use cool grease during DRIE. After DRIE, some of
> cool grease  was remained on the wafer surface, then,
> the wafer  was soaked in acetone or IPA for more than
> 1 hour, but both were useless.
>    how to remove cool grease?
>   I will be very grateful if anyone give me some
> information.
>   Thanks!
> Yahoo! Health - Feel better, live better
> http://health.yahoo.com
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