You can generate masks for ACES simulations using AutoCad as follows:

Make sure you set the drawing background in AutoCad to white.  Draw your
mask, using "solid" regions in black, then export the drawing as a bitmap.

Roger Shile

-----Original Message-----
From: Luiz Marangoni [mailto:[email protected]]
Sent: Monday, July 29, 2002 5:15 PM
To: MEMS Talk List
Subject: [mems-talk] Masks for ACES simulations


Hello folks,

I4m starting to use ACES (Anisotropic Etch Simulator) to simulate some
structures but I didn4t find a (good) way to generate the masks to use in
the simulations.
I4m using FreeHand (a vetorial editor) to generate the masks and to export
in BMP format, but I4m facing some ems with this procedure (distortion of
the dimensions).
Someone know some way to use AutoCad or LASI to generate the masks or have
used the CIF or GDS formats in ACES simulations?
Thanks in advance,

Luiz Marangoni
UNICAMP - Campinas - Brazil
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