How do I get a copy of ACES?

Richard Nelson



At 09:14 PM 7/29/02 -0300, you wrote:
>Hello folks,
>
>I4m starting to use ACES (Anisotropic Etch Simulator) to simulate some
>structures but I didn4t find a (good) way to generate the masks to use in
>the simulations.
>I4m using FreeHand (a vetorial editor) to generate the masks and to export
>in BMP format, but I4m facing some ems with this procedure (distortion of
>the dimensions).
>Someone know some way to use AutoCad or LASI to generate the masks or have
>used the CIF or GDS formats in ACES simulations?
>Thanks in advance,
>
>Luiz Marangoni
>UNICAMP - Campinas - Brazil
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