Roger,
Message: 7
Hi,
I am looking for a method of checking frontside-to-backside alignment at
develop inspect. The photoresist pattern (on both sides of the silicon
wafer) is a little over a micron thick. Years ago, AO (American Optical)
offered such a microscope. All suggestions will be appreciated.
Thanks in advance,
Roger Brennan
Endevco
355 N. Pastoria Avenue
Sunnyvale, CA 94085
(408)-739-3533 ext 204
[email protected]
1403 Forrestal Ave.
San Jose, CA 95110
(408)-453-0711
[email protected]
Roger Brennan
We built our own tool for front to back inspection with a local supplier
and are currently working on a more advanced tool. Our current
features and alignmnet criteria are very large.(Resist >3u, l/s > 50u, reg
20u)
I do belive that EVG does offer a commercial tool.
avi
Avi Laker
Teccor Electronics
972 756 8237 Office
214 439 6770 Pager
