First of all, thank you for your attention Roger,
I tried this procedure, but the size of the exported bitmap file is
diferent of the size the file generated in AutoCAD. Some insight about this
problem?
Thank you,
Luiz Marangoni
>You can generate masks for ACES simulations using AutoCad as follows:
>
>Make sure you set the drawing background in AutoCad to white. Draw your
>mask, using "solid" regions in black, then export the drawing as a bitmap.
>
>Roger Shile
>
>-----Original Message-----
>From: Luiz Marangoni [mailto:[email protected]]
>Sent: Monday, July 29, 2002 5:15 PM
>To: MEMS Talk List
>Subject: [mems-talk] Masks for ACES simulations
>
>
>Hello folks,
>
>I4m starting to use ACES (Anisotropic Etch Simulator) to simulate some
>structures but I didn4t find a (good) way to generate the masks to use in
>the simulations.
>I4m using FreeHand (a vetorial editor) to generate the masks and to export
>in BMP format, but I4m facing some ems with this procedure (distortion of
>the dimensions).
>Someone know some way to use AutoCad or LASI to generate the masks or have
>used the CIF or GDS formats in ACES simulations?
>Thanks in advance,
>
>Luiz Marangoni
>UNICAMP - Campinas - Brazil
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