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MEMSnet Home: MEMS-Talk: Graded mask for SU8 structures
Graded mask for SU8 structures
2002-08-01
Magali Brunet
2002-08-01
Eric Johnson
2002-08-01
Magali Brunet
Graded mask for SU8 structures
Magali Brunet
2002-08-01
Hello All,

I am working with SU8 and there is something i would like to try with
it, but i am not sure it is possible:
I would like to create SU 8 structures with sloped walls (as oppose to
vertical). Can we use a graded mask (from dark to light without steps)
for this? has anyone done it before?
If yes, are the results convincing?

Thanks a lot in advance for your help,

Magali Brunet
--
PEI Technologies,
NMRC, Lee Maltings, University College,
Cork, Ireland.

Tel: +353 21 4 904279
Fax: +353 21 4 270271
email: [email protected]

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