Magali,

We have used SU8 with a gray scale mask and were able to form analog patterns
in it.  You need to match the linear response of SU8 with the OD, or exposure
dose, for your desired profile.


Let me know if this helps

Eric G. Johnson, PhD
Assistant Professor of Optics
School of Optics/CREOL
University of Central Florida
P.O. Box 162700
4000 Central Florida Blvd
Orlando, FL 32816-2700
(407)823-6803
Fax 823-6880

>>> [email protected] 8/1/2002 9:56:33 AM >>>
Hello All,

I am working with SU8 and there is something i would like to try with
it, but i am not sure it is possible:
I would like to create SU 8 structures with sloped walls (as oppose to
vertical). Can we use a graded mask (from dark to light without steps)
for this? has anyone done it before?
If yes, are the results convincing?

Thanks a lot in advance for your help,

Magali Brunet
--
PEI Technologies,
NMRC, Lee Maltings, University College,
Cork, Ireland.

Tel: +353 21 4 904279
Fax: +353 21 4 270271
email: [email protected]
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