A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Re: polyimide
Re: polyimide
1996-11-21
Gert F. Eriksen
Re: polyimide
Gert F. Eriksen
1996-11-21
 Ingrid. Y. Xu wrote:
> Could anyone suggest some adhesion promotor for polyimid? I have poor adhesion
> of polyimide on glass substrate. And I wonder why after curing, the adhesion
> decays. Is it because of the stress induced during curing? Thanks in adveance.

For Duponts Polyimide I have used there VM-651 with great success. It
is the tradename for alpha-aminopropyltriethoxysilane.

It has to be diluted in  DI water (99% DI-water + 1% VM-651), then
spin-on the wafer and dried for 30 min at 120C.

-Gert Eriksen
[email protected]


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Mentor Graphics Corporation
Addison Engineering
MEMS Technology Review
Nano-Master, Inc.