Ingrid. Y. Xu wrote:
> Could anyone suggest some adhesion promotor for polyimid? I have poor adhesion
> of polyimide on glass substrate. And I wonder why after curing, the adhesion
> decays. Is it because of the stress induced during curing? Thanks in adveance.
For Duponts Polyimide I have used there VM-651 with great success. It
is the tradename for alpha-aminopropyltriethoxysilane.
It has to be diluted in DI water (99% DI-water + 1% VM-651), then
spin-on the wafer and dried for 30 min at 120C.
-Gert Eriksen
[email protected]