Mahesh -
This website has fairly good processing procedure for SPR220-7.0 -
http://www-snf.stanford.edu/Process/Lithography/SPR220.html
I use this as a guideline modified it alittle to optimize my process.
Thanks,
Greg Miller
KVH Industries
Email: [email protected]
-----Original Message-----
From: Mahesh Pitchumani [mailto:[email protected]]
Sent: Thursday, August 01, 2002 1:35 PM
To: [email protected]
Subject: [mems-talk] SPR-220 spin coating problem
Hi,
I am trying to spin coat SPR-220-7 thick resist from MicroChem with an
objective of getting 10-40 micron thick layers. I tried the process
supplied
by the company but it seems to give an uneven coat. Could anybody
suggest some
recipes for coating 10-40 micron thick layers with SPR_220.
I Thank you in advance for your help.
Mahesh Pitchumani
School of Optics/CREOL,
University of Central Florida.
4000 Central Florida Blvd,
Orlando, FL 32816-2700
Ph : 407-823-6827
Fax : 407-823-6880
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