Dear MEMS experts:

         I got a big problem recently when developing SU8 mold. I am
using SU8-2025 to make 50um thick structures, which are many square
holes(25x25um, spacing 25um). But I cannot get my structures becasue the
developing takes too long. My developing procedure is as follows: After
developing for 10 minutes with strong agitation (underdeveloped), I put
the wafer in the developer for about 4 hrs with a stirer rotating.
Still underdeveloped but looks better. It seems that the developer cannot
get into the holes. I am not sure how long it will take to fully develop
the structure but it's not a good idea to just increase the developing
time. Does any people have the experience before? Is there any method
that can enhance the developing? Please give me some suggestions. Your
help is highly appreciated.

Bo

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