Hello everyone,

I was wondering if any of you ever used SU-8 as a dielectric coating.
Currently we have been using it in microfluidics applications, but the
problem is our coatings turn out quite thick.  I believe we are using SU-8
2 for this process.  This is supposed to give you the thinnest coating
which I believe is in the order of ~2 micron.  I was wondering if the
coating process can somehow be altered/modified to make it even thinner.
Any suggestions? Also we are spin coating SU-8 onto our substrates.  I am
suspecting that this process reveals its limitations in terms of coverage
of the whole area.  From visual inspection, I could see that there are
places where the coating didn't cover at all.  Could anyone kindly suggest
a more effective method of coating?  Thanks a bunch,

*******************************************************************************
Rajib Ahmed
347 Hopeman Engineering Building
Department of Electrical and Computer Engineering
University of Rochester
Rochester,NY 14627
Email:[email protected]
Phone#:(585)275-8093
*******************************************************************************

On Fri, 9 Aug 2002, Tingrui Pan wrote:

>Dear MEMS friends,
>
>I am using SU-8 5 (5um) and making 1um, 2um or 5um trench features. I followed
the Recipe from MicroChem, it seems not very good. There are always some
remainings in the small trench. And I also tried longer time to develop them,
and SU-8 start to peel off then. I wonder if somebody used SU-8 5 before and get
nice result with small features. Could you share your photolithography recipe?
Thanks for help,
>
>Best regards,
>
>Tingrui
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