Tingrui,

This website is very helpful and may point out some problems and
solutions other people have noticed.
http://aveclafaux.freeservers.com/SU-8.html

The Exposure trick by Steve Hobson - might be your problem as well.
Thanks,

Greg Miller
KVH Industries
Email: [email protected]


-----Original Message-----
From: Tingrui Pan [mailto:[email protected]]
Sent: Friday, August 09, 2002 8:53 AM
To: [email protected]
Subject: [mems-talk] SU-8 5 Photolithography Recipe


Dear MEMS friends,

I am using SU-8 5 (5um) and making 1um, 2um or 5um trench features. I
followed the Recipe from MicroChem, it seems not very good. There are
always some remainings in the small trench. And I also tried longer time
to develop them, and SU-8 start to peel off then. I wonder if somebody
used SU-8 5 before and get nice result with small features. Could you
share your photolithography recipe? Thanks for help,

Best regards,

Tingrui
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