Fred,
     The temperature of the silane deposition is not written in concrete.  It
would work well at just about any temperature provided the moisture has been
removed and vacuum allows the removal of moisture at temperatures below room
temperature.  You need to be aware of vacuum freezing which can be taken care
of by repeated warm gas vacuum interchanges.  HMDS should work on epoxy it is
looking for hydrogen usually Hydroxyl ions which are present every where.  I
am based in San Jose Ca. phone number 408 954 8353.  Do not know which gasses
to recommend but we can discuss it.  Bill

-----Original Message-----
From: Fred Hussain [mailto:[email protected]]
Sent: Friday, August 09, 2002 1:09 AM
To: [email protected]
Subject: RE: [mems-talk] Adhesion of metal to epoxy substrates


Bill,

It sounds like a good idea, but unfortunately the epoxy we use must not be
exposed to temperatures above ~60oC, otherwise it starts getting soft and we
lose our features. Can it be done at the lower temperature? What sort of
gases do you recommend, SF6 or CF4 as well as O2, Ar, N2? We use hexane to
remove silicone and have a plasma asher with the latter of the gases
connected, which is used just prior to the metallisation. Do you know of any
adhesion promoters (HMDS?) which would work on epoxy? Also, where abouts are
you based, USA?

Kind regards,

Fred.

-----Original Message-----
From: [email protected] [mailto:[email protected]]On
Behalf Of Bill Moffat
Sent: 07 August 2002 15:39
To: [email protected]
Subject: RE: [mems-talk] Adhesion of metal to epoxy substrates


Fred,
     This could explain a number of special units we have built with no
indication of the final use.  These are special Plasma/Silane deposition
units.  Think stainless oven set at 150 degrees C able to do vacuum priming
with flat capacitive stainless plasma generators for precleaning.  let me
know
if you want to test this approach.  Bill Moffat

-----Original Message-----
From: Fred Hussain [mailto:[email protected]]
Sent: Wednesday, August 07, 2002 1:31 AM
To: [email protected]
Subject: [mems-talk] Adhesion of metal to epoxy substrates


Dear Collegues,

I am looking for any advice/information on how to improve adhesion of
evaporated metal (nichrome + gold) onto thermo-epoxy based substrates. In
particular, information on chemical and physical (plasma) surface
pre-treatments and/or alternative metals which may have a distinct advantage
over nichrome and gold, would be highly appreciated.

Thanking you in advance,

Fred.
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