Hi, folks,

A question about KOH etching. If two exactly co-centered squares are opened on
both sides of a DSP 100 nitride coated wafer, the sizes are different, but the
etching deepth will overlap with each other, and a through hole is expected. The
question is what happens at the intersection point of the two piramid hole? Will
the sharp edges be etched away or well kept? If there is misalignment of the two
square holes, then what will happen at the meet point?

Any idear is appreciated, esp. those direct experiences on this.

Y. Gao