10 nm lines and spaces is available commercially. See www.gennano.com
Vic Kley
----- Original Message -----
From: "David Barrow"
To:
Sent: Sunday, August 11, 2002 1:37 PM
Subject: Re: [mems-talk] Nanoelectrodes suppliers
> Dear Rakesh
> we can define nanoscale features with a minimum line width of 70nm using
our
> Raith direct write system. If you wish to send a sketch showing precise
> geometries and list materials specifications (substrate, adhesion,
electrode
> material, thickness) we can give you some definitive feedback on how we
can
> help.
> Cheers
> David Barrow
>
> -----------------------------------------------
> Professor David Barrow
> Laboratory for Applied Microsystems & NanoFAB
> Cardiff School of Engineering
> Cardiff University
> Queen's Buildings
> 1-5 The Parade
> PO Box 689
> Cardiff CF24 3TF
> Wales
> United Kingdom
> Tel +44(0)29 2087 5921 (Office)
> Tel +44(0)29 2087 4716 (Laboratory)
> Mob +44(0)77 8526 4780
> E-m [email protected]
> -----------------------------------------------
>
> >>> [email protected] 08/09/02 16:09 PM >>>
> Dear MEMS friends,
> I tried to find out suppliers of nanoelctrodes on web,
> & i also contact to some suppliers, but they can
> fabricate only the microelectrodes (gap between
> electrodes >5 micron). I want nanoelectrodes (gap
> between nanoelectrodes should <200 nm). We have
> facility for fabrication of microelectrodes. If
> anybody can solve my problem then contact me on
> address given below:
> Rakesh Dabas
> Scintist
> Microelectronics Instrumentation Division (MID)
> Central Scientific Instruments Organisation (CSIO)
> Sector 30-C, Chandigarh-160030
> India
> E-Mail: [email protected]
> [email protected]
>
>
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