Hi,
i am not sure if u r asking for suppliers or about the
fabrication, but electrodes with upto sub 10 nm gaps can be fabricated
using e-beam lithography.

Kousik Sivakumar
Graduate student
Department of ECE
University of Delaware
Home: 302-737-5232
E-mail: [email protected]

On Fri, 9 Aug 2002, [iso-8859-1] Rakesh Dabas wrote:

> Dear MEMS friends,
> I tried to find out suppliers of nanoelctrodes on web,
> & i also contact to some suppliers, but they can
> fabricate only the microelectrodes (gap between
> electrodes >5 micron). I want nanoelectrodes (gap
> between nanoelectrodes should <200 nm). We have
> facility for fabrication of microelectrodes. If
> anybody can solve my problem then contact me on
> address given below:
> Rakesh Dabas
> Scintist
> Microelectronics Instrumentation Division (MID)
> Central Scientific Instruments Organisation (CSIO)
> Sector 30-C, Chandigarh-160030
> India
> E-Mail: [email protected]
>         [email protected]
>
>
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