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MEMSnet Home: MEMS-Talk: adhesion of Ag to Si
adhesion of Ag to Si
2002-07-24
Thomas B. Jones
2002-07-25
Jeff Zahn
2002-07-26
Zhen YANG
2002-07-24
[email protected]
2002-08-14
TEL Klaus Beschorner
adhesion of Ag to Si
TEL Klaus Beschorner
2002-08-14
> Is it true that Ag exhibits poor adhesion to Si, say for example, in
> comparison to Al?  Will a thin layer of Cr help to improve this adhesion?
> Finally, are there other straightforward methods to promote adhesion of
> these materials?

Standard IC packaging stacks for Silver usually follow the "adhesion
layer" - "intermetallic barrier" - "bond metal" scheme, e.g.
Ti - Ni - Ag or Cr - NiV - Ag.
The two most straightforward methods to promote adhesion without
any underlayers are:
a1) bring the substrate in "as clean as possible"
a2) if possible, roughen up the surface a bit (sputter etch)
b) keep substrate temperature as low as possible

regards
klaus
--

                        (TEEL)          Tokyo Electron Europe Limited
                                        PVD Process Support  (ex MRC)
Klaus Beschorner                                   Tel +49-7033-45683
Drosselweg 6                                       Fax +49-7033-45631
71120 Grafenau, Germany                       Mobile +49-174 315 7754

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