Hello Bo,
I just started looking for the same information, this is all I've found so
far: http://www.ucop.edu/research/micro/98_99/98_144.pdf.
Suzanne

-----Original Message-----
From: [email protected] [mailto:[email protected]]On
Behalf Of Bo He
Sent: Monday, August 19, 2002 12:04 PM
To: [email protected]
Subject: [mems-talk] Patternable PDMS


Dear MEMS expert:

        Are there any articles about how to pattern PDMS by conventional
photolithography? Any input is highly appreciated.



Bo



------------------------------------------------------------------------

Join the worlds largest e-mail service with MSN Hotmail. Click Here
_______________________________________________
[email protected] mailing list: to unsubscribe or change your list
options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
Hosted by the MEMS Exchange, providers of MEMS processing services.
Visit us at http://www.memsnet.org/