High resolution printers (Laser or Inkjet) have a dot placement
accuracy of under 10um. Dots are typically 20-30um in diameter
on good (photo-quality) transparencies.
You'll lose accuracy, though, when you transfer the pattern to
your substrate, even if you hold the flexible "mask" in place
with a quartz plate.
A "mask" printout will cost you only a couple of dollars, but
acquiring such a printer is more expensive than quartz masks
from a commercial mask maker. CAD shops sometimes have them and
might be willing to print for you.

Greetings,
        Frank Berauer
        Senior R&D Engineer
        Hewlett-Packard Singapore


-----Original Message-----
From: weiwei [mailto:[email protected]]
Sent: Wednesday, August 21, 2002 9:37 PM
To: [email protected]
Subject: Re: [mems-talk] Laser printer masks


Hi,

    we use those mask used by the offset printing industry. They offer
resolution far better than any high res laser printer, plus, one side is
coated with argentum or mercury, making UV 100% unpenetrable

    Just ask any offset printing service provider, i'm sure they are dirt
economy, even compared with high res printer

   and, we successfully scale down to 30um without using any lens. We
actually can get 10um, but the uniformity not that good

keep in contact

Leow
Universiti Teknologi Malaysia

-------Original Message-------

From: [email protected]
Date: Wednesday, August 21, 2002 19:44:03
To: [email protected]
Subject: [mems-talk] Laser printer masks

Hi,

i need some cheap masks; the easiest solution we found is using a
laser-printer on overhead foiles. the structure size i can reach with this
is so far limited to be 200microns.

does anybody have experinece how to make structures smaller (without
spending money on a mask) and what brands (models) of transparencies and
printers might be good ? (i aim at a factor of 2 to 4 in structure size)

does anybody know a place where you can buy such really cheap masks with
even better resolution ?


thanks already,

mike
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