MEMS-talk

News	MEMSnet Home: MEMS-Talk: Lithography alignment for front and back side of wafer KOH etching from both sides 2002-08-09 Gao, Yuanfang (UMC-Student) 2002-08-17 jafar j babaei Lithography alignment for front and back side of wafer 2002-08-23 Kousik Sivakumar Lithography alignment for front and back side of wafer 2002-08-26 Rohit Srivastava Lithography alignment for front and back side of wafer 2002-08-27 Kousik Sivakumar 2002-08-12 Venstra, W.J. 2002-08-12 [email protected] Lithography alignment for front and back side of wafer Kousik Sivakumar 2002-08-23 Hi, I am trying to get a through-hole in a Si wafer. I would like to know how to perform alignment for the front and back side of a wafer. I have not been able to align the two squares on either side of the wafer accurately. Any suggestion regarding this will be really helpful. Any suggestion for forming a through-hole without having to make two squares on either side of the wafer will also be helpful. Thanks Kousik Sivakumar Graduate student Department of ECE University of Delaware Home: 302-737-5232 E-mail: [email protected] reply
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