Hello Kousik,

You need a front to back alignment tool.  EVG makes such a tool.  Call them
(602 437 9492) and you can probably work something out.

Mike Cain
Photolithography Engineering
JDS Uniphase
MEMS Business Unit
3026 Cornwallis Road
P.O. Box 13942
Research Triangle Park, NC 27709
T-919-248-1828
F-919-248-1455
[email protected]
http://www.memsrus.com
http://www.jdsuniphase.com


-----Original Message-----
From: Kousik Sivakumar [mailto:[email protected]]
Sent: Friday, August 23, 2002 4:19 AM
To: [email protected]
Subject: [mems-talk] Lithography alignment for front and back side of
wafer


Hi,
I am trying to get a through-hole in a Si wafer. I would like to know how
to perform alignment for the front and back side of a wafer. I have not
been able to align the two squares on either side of the wafer accurately.
Any suggestion regarding this will be really helpful.
Any suggestion for forming a through-hole without having to make two
squares on either side of the wafer will also be helpful.
Thanks

Kousik Sivakumar
Graduate student
Department of ECE
University of Delaware
Home: 302-737-5232
E-mail: [email protected]
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