Neal,
Our wafers are GaAs so we have to avoid the use of HF.

Peter Wright

-----Original Message-----
From: [email protected] [mailto:[email protected]]On
Behalf Of Neal Ricks
Sent: Tuesday, August 27, 2002 1:19 PM
To: [email protected]
Subject: Re: [mems-talk] Tantalum nitride etch

Have you tried the published Tantalum etches, or do you have to avoid use of
HF?


 Peter & Judy Wright
wrote:Does anyone know of a wet etch for tantalum nitride? We are using it
for an
underbump metalization at a subcontractor who does not have a dry etch
capability.

Peter Wright
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